Superior Sensitivity for Contamination Control
The Transpector® Gas Analysis System is an RGA that provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and four times faster scanning over low level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures.
Features at a Glance
- 100-,200-,and 300-amu systems with Faraday cup or combination electron multiplier/Faraday cup
- improved hydrogen detection
- superior peak amplitude and position stability
- up to 10 times improvement in signal to noise ratio compared to original Transpector
- faster scanning over low-level signals
- nine-decade electronic dynamic range
- software options for single and multi-chamber systems
- partial pressure measurement from 1 X 10 -4 Torr to 5 X 10 -15 Torr
ASSOCIATED TECHNICAL INFORMATION
Brochures and Datasheets:
Reference:
Technical Information:
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Calculating Partial Pressures
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Heating Jackets Can Improve RGA Performance
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Interpretation Guide - General RGA Spectrum
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New Digital Input/Output Board For Transpector Gas Analysis System Using TWare 32
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Partial Pressures vs. Total Pressure for an Open Ion Source RGA
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Residual Gas Analyzers for Contamination Checking
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Residual Gas Analyzers for Leak Detection
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Technical Note - Calculating Sensitivity for RGA Partial Pressures
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Technical Note - Choosing the Appropriate RGA
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The Advantages of an RGA with Analog Outputs
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The Practical Use of Residual Gas Analysis in a Semiconductor Thermal Processing Module
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Transpector 2 Improvements Lead to Better Process Monitoring
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